TGX

The TGX calibration gratings are intended for lateral calibration of SPM scanners. They can also be used for:

• detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects
• determination of the tip aspect ratio

The silicon calibration grating from the TGX series is an array of square holes with sharp undercut edges formed by anisotropic etching along the (111) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm.

Specifications

• Pitch value: 3 µm
• Pitch accuracy: 0.1 µm
• Edge radii: <5 nm
• Step height: 1 µm
• Active area: 1x1 mm
• Chip dimensions: 5 x 5 x 0.3 mm
• Procducer: MikroMasch