TGT1

Calibration grating TGT1 is intended for

• tip shape and sharpness estimation and further using in deconvolution program;
• tip degradation and contamination control.

Specification

• Structure: the grating is formed on Si wafer top surface
• Pattern type: 3-D array of sharp tips
• Period: 3±0,05 µm
• Height: 0.3 - 0.5µm
• Chip size: 5 x 5 x 0,5 mm
• Effective area: central square 2x2 mm
• Tip angle: 50±10 degrees (on the very tip end)
• Tip curvature radius: ≤10 nm
• Diagonal period: 2,12 µm
• Producer: TipsNano