TGS1 (set of TGZ1, TGZ2, TGZ3)

Grating set TGS1 consists of 3 calibration gratings: TGZ1, TGZ2, TGZ3 nad intended for Z and X (or Y) calibration and nonlinearity measurements.

• TGZ1 - for Z-axis calibration (step height 20,0±1.5 nm) and nonlinearity measurements
• TGZ2 - for Z-axis calibration (step height 110,0±2 nm) and nonlinearity measurements
• TGZ3 - for Z-axis calibration (step height 520 ± 3 nm) and nonlinearity measurements.

Specifications

• Structure: step - SiO2, bottom - Si
• Pattern type: 2 - Dimensional
• Line grating, 3 µm pitch
• Active area: 3 mm x 3 mm
• Producer: TipsNano