TGXYZ02

The TGXYZ calibration gratings are intended for vertical and lateral calibration of SPM scanners. One can compensate for vertical non-linearity by using several calibration gratings with different nominal step heights.

Calibration gratings from the TGXYZ series are arrays of different structures comprising rectangular SiO2 steps on a Si wafer. The small square in the center with dimensions 500 µm by 500 µm includes circular pillars and holes, as well as lines in the X- and Y- direction with a pitch of 5 µm. The large square with dimensions 1mm by 1mm contains square pillars and holes with a pitch of 10 µm.

Specifications

• Step height: 100 nm (3% accuracy)
• 5 x 10 µm pitch
• Active area: 1 mm x 1 mm
• Chip dimensions: 5 mm x 5 mm x 0,3 mm
• Producer: MikroMasch