TGZ01

TGZ series are 1-D arrays of rectangular SiO2 steps on a Si wafer for vertical calibration. Due to the lithography process, the corners of the steps and thoughs can be slightly rounded.

Specifications

• Pitch height: 22,5 nm
• Line grating, 3 µm pitch
• Active area: 3 mm x 3 mm
• Producer: MikroMasch