TGX1

Calibration grating TGX1 is intended for

• lateral calibration of AFM scanners
• detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects
• determination of the tip sharpness

Specification

• Structure: Si
• Pattern type: chessboard-like array of square pillars with sharp undercut edges
• Period: 3±0,05 µm
• Height: ~ 0,6 µm
• Chip size: 5x5x0,5 mm
• Effective area: central square 3x3 mm
• Edge curvature radius: less then 10 nm
• Producer: TipsNano