TGS1F (set of TGZ1, TGZ2, TGZ3, TGZ4)

Grating set TGS1 consists of 4 calibration gratings: TGZ1, TGZ2, TGZ3, TGZ4 and intended for Z and X (or Y) calibration and nonlinearity measurements.

• TGZ1 - for Z-axis calibration (step height 20,0±1.5 nm) and nonlinearity measurements
• TGZ2 - for Z-axis calibration (step height 110,0±2 nm) and nonlinearity measurements
• TGZ3 - for Z-axis calibration (step height 520 ± 3 nm) and nonlinearity measurements.
• TGZ4 - for Z-axis calibration (step height 1517 ± 20 nm) and nonlinearity measurements

Specifications

• Structure: step - SiO2, bottom - Si
• Pattern type: 2 - Dimensional
• Period: 3±0,05 µm
• Chip size: 5x5x0,5 mm
• Effective area: central square 3x3 mm
• Producer: TipsNano