6H-SiC(0001) based calibration sample is designed to perform easy calibrations of AFM scanner vertical movement in several nanometer intervals. The simplicity of calibration process is provided by nearly uniform distribution of monolayer high (1.5 nm) steps on the sample surface demonstrating chemical and mechanical stability. The step height corresponds to the lattice constant of 6H-SiC crystal in  direction.
- Chip size – 5 x 5 x 0,3 mm
- Average interstep distance: 0,2 - 0,5 µm
- Misorientation of surface ~ 0,3°
- Average roughness of the area between steps (terraces): 0,09 nm
- Single step height 1,5nm
- Producer: TipsNano